High sensitive, linear and thermostable pressure sensor utilizing bipolar junction transistor for 5 kPa

Abstract Research of pressure sensor chip utilizing novel electrical circuit with bipolar-junction transistor-based (BJT) piezosensitive differential amplifier negative feedback loop (PDA-NFL) for 5 kPa range was done. The significant advantages developed PDA-NFL in the comparative analysis advanced analogs, which are using Wheatstone piezoresistive bridge, clearly shown. experimental results prove that 4.0 × mm 2 area has sensitivity S = 11.2 ± 1.8 mV/V/kPa nonlinearity 2K NLback 0.11 0.09%/FS (pressure is applied from back side chip) and NLtop 0.18 top chip). All temperature characteristics have low errors, because precision elements balance electric used. Additionally, burst 80 times higher than working range.